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. 2017 Nov 29;3(11):eaao3170. doi: 10.1126/sciadv.aao3170

Fig. 2. AFM and Auger characterization.

Fig. 2

(A) Top-view and side-view schematics of selective ALD LiF deposition on h-BN/Si. (B) AFM characterization of single-layer h-BN on a Si substrate. (C) Height profile of single-layer h-BN on a Si substrate. (D and E) Height profiles of ALD LiF–coated single-layer h-BN on a Si substrate. (F) AFM characterization of ALD LiF–coated single-layer h-BN on a Si substrate. (G) Elemental mapping of N, B, and F using Auger spectroscopy for h-BN/Si. (H) Elemental mapping of N, B, and F using Auger spectroscopy for LiF/h-BN/Si.