Table 2.
Q-factor and FoM values around Fano resonances.
| S | 50 nm | 60 nm | 70 nm | 80 nm | ||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Fano Modes | F1 | F2 | F3 | F1 | F2 | F3 | F1 | F2 | F3 | F1 | F2 | F3 |
| Q-factor | 64 | 12 | 18 | 56 | 11 | 20 | 35 | 14 | 12 | 17 | 8 | 18 |
| FoM | 32 | 6 | 10 | 35 | 7 | 12 | 24 | 9 | 7 | 13 | 6 | 11 |
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