Table 2.

Comparisons of tactile sensor material types.

Material Type	Patterning		Properties
	Deposit	Etch
Silicic	High temperature	Highly dangerous chemical	Good mechanical properties
	High vacuum requirement		Tunable electrical conductivity
	Complex equipment	Complex equipment	Good thermal conductivity
	Low rate		Good optical properties
			High chemical stability
Metallic	Flexible temperature	Flexible and simpler etching method	Good electrical conductivity
	Flexible vacuum requirement		Good thermal conductivity
	Medium equipment complexity	Simpler equipment	Medium chemical stability
	Medium rate
Polymer	Low temperature	Safe chemical	Medium to low mechanical properties
	Low vacuum requirement		Insulator
			High flexibility in functionalization
	Simple equipment	High rate	Good optical properties
	High rate		Low chemical stability, prone to oxidation