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. 2017 Oct 25;17(11):2451. doi: 10.3390/s17112451

Figure 4.

Figure 4

(a) Optical micrograph of the complementary metal-oxide semiconductor (CMOS) substrate; (b) Schematic diagram of the capacitive readout circuit; Time responses of (c) the voltage of the sensor capacitor VC and (d) the oscillation output voltage Vout.