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Fabrication results: Optical micrographs of (a) CMOS substrate with Au bumps, an Au sealing frame and a GND electrode and (b) low temperature cofired ceramic (LTCC) interposer substrate with 3-axis sensing electrodes; (c) Front side and (d) back side views of a fabricated tactile sensor; (e) Surface-mounted tactile sensor on a glass substrate with interconnections.
