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The performance of the fabricated 3-axis integrated tactile sensor.
| Force | Sensitivity [Count/mN] | Noise [Count] | Hysteresis [%] | Average Cross-Axis Sensitivity [%] | ||
|---|---|---|---|---|---|---|
| X-Axis | Y-Axis | Z-Axis | ||||
| FX (−1 to 1 N) | 15.1 | 12.4 | ≤ 1.7 | - | 5.5 | 9.0 |
| FY (−1 to 1 N) | 14.1 | 7.6 | ≤ 1.1 | 5.2 | - | 7.2 |
| FZ (0 to 1.3 N 1) | ≥ 34.5 | 3.5 | ≤ 0.3 | 8.2 | 10.4 | - |
1 Z-Axis output value NZ saturate when normal force of over 1.3 N is applied.
