Table 2.

Intrasheet uniformity and intersheet uniformity obtained by netOD value.

	Lot A	Lot B	Lot C	Lot D	Lot E
Intrasheet Uniformity	3.0%	2.7%	0.8%	0.5%	0.6%
Intersheet Uniformity	1.0%	0.7%	0.4%	0.3%	0.8%