| U11 | U22 | U33 | U12 | U13 | U23 | |
| Cl1 | 0.01956 (13) | 0.02040 (13) | 0.01184 (12) | −0.00159 (8) | 0.00314 (8) | −0.00202 (8) |
| O1 | 0.0170 (3) | 0.0273 (4) | 0.0174 (3) | −0.0029 (3) | 0.0071 (3) | −0.0028 (3) |
| O2 | 0.0159 (3) | 0.0286 (4) | 0.0168 (3) | −0.0068 (3) | 0.0037 (3) | −0.0038 (3) |
| O3 | 0.0340 (5) | 0.0363 (5) | 0.0200 (4) | −0.0003 (4) | −0.0028 (3) | 0.0107 (4) |
| O4 | 0.0212 (4) | 0.0433 (5) | 0.0243 (4) | 0.0042 (4) | −0.0003 (3) | 0.0001 (4) |
| O5A | 0.0152 (8) | 0.0467 (13) | 0.0185 (8) | −0.0033 (8) | 0.0052 (6) | −0.0080 (8) |
| O5B | 0.0160 (7) | 0.0243 (9) | 0.0188 (7) | −0.0013 (7) | 0.0028 (5) | −0.0010 (7) |
| N1 | 0.0231 (4) | 0.0215 (4) | 0.0160 (4) | 0.0002 (4) | 0.0071 (3) | −0.0002 (3) |
| C1 | 0.0148 (4) | 0.0154 (4) | 0.0132 (4) | 0.0008 (3) | 0.0035 (3) | 0.0012 (3) |
| C2 | 0.0171 (4) | 0.0174 (4) | 0.0100 (4) | −0.0015 (3) | 0.0033 (3) | −0.0007 (3) |
| C3 | 0.0147 (4) | 0.0186 (5) | 0.0137 (4) | 0.0012 (4) | 0.0025 (3) | 0.0021 (3) |
| C4 | 0.0177 (4) | 0.0163 (4) | 0.0151 (4) | −0.0002 (4) | 0.0022 (3) | 0.0005 (3) |
| C5 | 0.0183 (4) | 0.0251 (5) | 0.0166 (4) | 0.0003 (4) | 0.0052 (3) | 0.0026 (4) |
| C6 | 0.0236 (5) | 0.0271 (6) | 0.0163 (4) | −0.0015 (4) | 0.0018 (4) | 0.0051 (4) |
| C7 | 0.0185 (5) | 0.0209 (5) | 0.0261 (5) | 0.0010 (4) | −0.0009 (4) | 0.0032 (4) |
| C8 | 0.0197 (5) | 0.0245 (5) | 0.0281 (5) | 0.0025 (4) | 0.0083 (4) | −0.0013 (4) |
| C9 | 0.0241 (5) | 0.0207 (5) | 0.0156 (4) | 0.0022 (4) | −0.0017 (4) | −0.0013 (4) |
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