U11	U22	U33	U12	U13	U23
Cl1	0.01602 (12)	0.01837 (13)	0.01388 (12)	−0.00454 (9)	0.00310 (9)	0.00181 (9)
Cl2	0.01776 (13)	0.01555 (12)	0.01668 (13)	0.00527 (9)	−0.00194 (9)	−0.00109 (9)
O1	0.0204 (4)	0.0252 (4)	0.0108 (4)	−0.0062 (3)	0.0022 (3)	−0.0016 (3)
O2	0.0165 (4)	0.0179 (4)	0.0136 (4)	−0.0054 (3)	−0.0007 (3)	−0.0014 (3)
O3	0.0202 (4)	0.0181 (4)	0.0140 (4)	0.0038 (3)	−0.0031 (3)	−0.0038 (3)
O4	0.0164 (4)	0.0164 (4)	0.0129 (4)	0.0021 (3)	−0.0034 (3)	0.0005 (3)
O5	0.0183 (4)	0.0175 (4)	0.0162 (4)	0.0037 (3)	−0.0050 (3)	−0.0004 (3)
O6	0.0196 (4)	0.0230 (4)	0.0135 (4)	−0.0083 (3)	0.0008 (3)	−0.0029 (3)
N1	0.0157 (4)	0.0177 (4)	0.0181 (5)	0.0022 (3)	−0.0003 (4)	0.0057 (4)
N2	0.0177 (4)	0.0173 (4)	0.0128 (4)	−0.0016 (3)	−0.0028 (4)	−0.0006 (3)
C1	0.0126 (4)	0.0151 (5)	0.0117 (5)	−0.0008 (4)	0.0003 (4)	0.0014 (4)
C2	0.0118 (4)	0.0151 (4)	0.0121 (5)	−0.0025 (4)	0.0018 (4)	0.0023 (4)
C3	0.0120 (4)	0.0131 (4)	0.0126 (5)	−0.0004 (3)	0.0000 (4)	0.0019 (4)
C4	0.0134 (4)	0.0129 (4)	0.0116 (5)	0.0001 (4)	0.0011 (4)	0.0012 (4)
C5	0.0135 (4)	0.0128 (4)	0.0133 (5)	0.0028 (4)	−0.0001 (4)	0.0007 (4)
C6	0.0122 (4)	0.0124 (4)	0.0126 (5)	−0.0005 (3)	−0.0001 (4)	0.0020 (4)
C7	0.0200 (5)	0.0153 (5)	0.0162 (5)	0.0000 (4)	−0.0032 (4)	0.0016 (4)
C8	0.0196 (5)	0.0141 (5)	0.0154 (5)	0.0020 (4)	−0.0011 (4)	0.0003 (4)
C9	0.0144 (4)	0.0131 (4)	0.0146 (5)	0.0000 (4)	0.0006 (4)	0.0032 (4)
C10	0.0201 (5)	0.0171 (5)	0.0125 (5)	0.0027 (4)	0.0010 (4)	0.0012 (4)
C11	0.0197 (5)	0.0180 (5)	0.0170 (5)	0.0045 (4)	0.0043 (4)	0.0034 (4)
C12	0.0170 (5)	0.0198 (5)	0.0129 (5)	0.0010 (4)	0.0016 (4)	0.0015 (4)
C13	0.0132 (4)	0.0164 (5)	0.0147 (5)	−0.0011 (4)	0.0008 (4)	0.0019 (4)
C14	0.0149 (5)	0.0137 (4)	0.0129 (5)	−0.0006 (4)	−0.0006 (4)	0.0002 (4)
C15	0.0156 (5)	0.0205 (5)	0.0148 (5)	−0.0039 (4)	0.0023 (4)	0.0001 (4)
C16	0.0146 (5)	0.0191 (5)	0.0181 (5)	−0.0032 (4)	−0.0001 (4)	0.0010 (4)