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. Author manuscript; available in PMC: 2018 Aug 1.
Published in final edited form as: J Microelectromech Syst. 2017 May 18;26(4):718–739. doi: 10.1109/JMEMS.2017.2699864

Fig. 28.

Fig. 28

Nanohole array plasmonic sensor [99]. (a) SEM images of the nanohole arrays in 6 sensor pixels of size 100 × 100 μm. The diameter of the nanohole is 200 nm. (b) A photo of the portable device, weighing 60 g and 7.5 cm tall, designed for POC applications. (a) Schematic of the on-chip imaging biosensing platform contains a battery, an LED, a plasmonic chip and a CMOS imager chip.