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| Source-to-M1 distance | 68.9 m |
| M1-to-G1 distance | 6.0 m |
| G1-to-slit distance | 6.0 m |
| Slit-to-G2 distance | 6.0 m |
| Grating subtended angle | 174° |
| Gratings G1a and G2a | |
| Interval | 1.2–5 nm (1000–250 eV) |
| Central groove density | 600 grooves mm−1 |
| Gratings G1b and G2b | |
| Interval | 5–25 nm (250–50 eV) |
| Central groove density | 150 grooves mm−1 |
