. 2017 Nov 24;17(12):2716. doi: 10.3390/s17122716

Table 1.

Comparison of different piezoelectric materials in terms of their dielectric constants, TCF, SAW propagation velocity and general comments for SAW manufacturing.

Piezoelectric Material	Dielectric Constant	TCF ^a (ppm/°C)	Max. Working ^b Temperature	Velocity (m/s)	Comments
Quartz (ST-X)	3.8	0	573 °C	3159	Common and inexpensive, Stable against temperature, Not suitable in aqueous phase.
LiTaO₃ (X-112° Y)	43	18	≈300 °C	3300	High frequency SAW devices, Suitable for liquids phase operation, Temperature drifts
LiTaO₃ (36° Y-X)	43	32	≈300 °C	4160
LiNbO₃ (128° Y-X)	85.2	75	≈300 °C	3979	High frequency SAW devices, Suitable for SH-SAW liquid phase, Larger TCF values
LiNbO₃ (64° Y-X)		80		4742
LiNbO₃ (Y-Z)		94		3488
AlN	8.5	19	≥1000 °C	5700	High frequency SAW devices and used in form of thin layer on other substrates, High thermal stability
La₃Ga₅SiO₁₄	18.23	≈0	1470 °C	2734	Enhanced piezoelectricity, High thermal stability Low insertion loss

^a TCF values for quartz, lithum tantalite (LiTaO₃) and lithium niobate (LiNbO₃) were taken from [38]. ^b The maximum working temperature data is derived from [39]. The data about aluminum nitride AlN is reported from [40] and for langasite (La₃Ga₅SiO₁₄) it is taken from [41].