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. Author manuscript; available in PMC: 2018 Jan 5.
Published in final edited form as: 2013 IEEE 26th Int Conf Micro Electro Mech Syst MEMS 2013 (2013). 2013 Mar 7;2013:http://ieeexplore.ieee.org/stamp/stamp.jsp?arnumber=6474161. doi: 10.1109/MEMSYS.2013.6474161

Figure 3.

Figure 3

SEM image of the device cross-section.