Table 2.

Parameters of the linear curves employed for parameterizing the growth coefficient results in Fig. 3 according to Eq. (3).

Wavelength – Topography	1ω – Plane	1ω – Grating	3ω – Plane	3ω – Grating
C (cm2/J)	1.6 × 10−2	4.8 × 10−2	3.2 × 10−2	6.1 × 10−2
Fth (J/cm2)	6.9	1.0	3.4	0.5