Table 2.

Magnitude of different sources of uncertainties for the solid films used in this study to calculate the enthalpy of sublimation (ΔH_s).

Gas	ΔHs /kJ·mol−1	uΔHsa /kJ·mol−1	σrb /kJ·mol−1	uTc /mK	uΔMd /kg ×10–28	ufe /µHz 298 K	uslopef /s−2 × 10−3	uGfilmg /MPa	uρSih /Kg·m−3	uGSii /MPa
Ne	1.90	0.29	0.06	42	3.35	<86	55	40	1	<<6.2
N2	7.34	0.48	0.13	33	0.23		1.5	51
Ar	7.79	0.24	0.03	63	2.98		4.6	96
O2	9.26	0.42	0.05	19	1.78		54	32
Kr	11.53	0.40	0.14	48	6.12		5.3	160
Xe	15.79	0.29	0.04	4	3.27		5.3	177
CO2	28.84	1.05	0.32	4	5.44		5.7	120
H2O	54.46	5.28	0.57	7	10.17		5	216		6.2

All uncertainties listed in the table are standard uncertainties u (0.68 confidence interval).

^au_ΔHs, combined standard uncertainty in ΔH_s of each gas

^bσ_r, standard deviation of ΔH_s values determined independently from each experimental run

^cu_T, combined maximum standard uncertainty values in temperature including the corrections from radiative heat load

^du_ΔM, standard uncertainty in atomic/molecular mass of the gas

^eu_f, standard uncertainty in the resonance frequency

^fu_slope, standard fitting error (maximum values) in the slope of line (Figure 5)

^gu_Gfilm, standard uncertainty in the shear modulus of each solid film

^hu_ρSi, standard uncertainty in the density of silicon

ⁱu_GSi, standard uncertainty in the shear modulus of silicon