Table 1. Film thicknesses (determined by AFM), lattice parameters and characteristic dose calculated for the monolayer and thin films of TMA. For the 18 min deposition, the angle γ is measured from 2D Fourier transforms of acTEM images (see ESI section 9).
| Deposition time | Thickness (nm) | a (nm) | b (nm) | γ (°) | Characteristic dose (electrons per nm2) |
| Monolayer (STM) | — | 1.65 ± 0.06 | 1.65 ± 0.06 | 60 ± 1 | — |
| 15 seconds | 2.1 ± 0.2 | 1.64 ± 0.02 | 1.64 ± 0.02 | 60.0 ± 0.2 | — |
| 1 minute | 5.5 ± 0.2 | 1.64 ± 0.02 | 1.64 ± 0.02 | 60.0 ± 0.3 | 13 ± 3 |
| 6 minutes | 16 ± 2 | 1.65 ± 0.02 | 1.65 ± 0.02 | 60.0 ± 0.2 | 100 ± 50 |