Figure 2.

Absorption spectrum for sub-hole Si grating on N-doped Si/Si HMM. (a) d is fixed at 100 nm while h varies from 100 to 600 nm. (b) d varies from 50 to 450 nm while h is fixed at 300 nm. Oblique incidence of angle 70 degrees was used for both cases (a) and (b). (c) TM and TE modes at three angles of incidence (0, 30 and 70 degrees) were studied for grating of dimensions d = 100 nm and h = 300 nm. (d) Color map showing absorption at different doping concentrations N_d.