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Schematic for BBA HMM. (a) 10 alternating layers of N-doped Si (yellow) and Si (blue) HMM with multi height sub-hole Si grating (MHSG). The period a is 500 nm, d is 50 nm, t is 300 nm and h are taken to be; 100, 200, 300, 400, 500 and 600 nm. (b) R, T and A for MHSG on N-doped Si /Si HM at normal incidence.
