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Resolution calibration using a customized two-hole targets, illumination wavelength λ = 632nm. (a) SEM, FPM and conventional microscope image of holes (200nm diameter) on the target. (b) Line plots of vertical intensity distribution through the center of each hole pair, showing a Sparrow resolution of (b1) 635 nm for 20X 0.5 NA objective, (b2) 475 nm for 40X 0.75 NA objective, (b3) 405 nm for the 100X oil immersion 1.25 NA objective, and (b4) 405 nm for 1.2 NAsys FPM setup.
