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|
Coherent
illumination |
Incoherent
illumination |
||
|---|---|---|---|
| Slit aperture (1D) system | 0.66 | 0.41 | |
|
| |||
| Circular aperture (2D) system | Two-point target | 0.73 | 0.47 |
|
| |||
| Two-slit target | 0.68 | 0.44 | |
