Fig. 3.

Evaluating performance of mirror scanners. (a) Diagram of galvanometer or resonant scanner with input beam diameter $d$. Given $d$ and the clear aperture of the galvanometer $W$, the maximum scan angle ${\theta }_{m,g}$ can be determined. (b) Diagram of spinning polygonal scanner with clear aperture $W$, input beam diameter $d$, beam footprint on the facet $d_m$, and feed angle $\alpha$. (c) Line rate of galvanometer mirrors, resonant scanners, and polygonal scanners. Parts are listed in Appendix B. (d) Maximum scan angle of scanners plotted as a function of input beam diameter for the nine scanners calculated using Eqs. (12) and (15). (e) Optical invariant of scanners in isolation plotted as a function of input beam diameter to scanner. Curves are colored according to legend in (d). Also shown is the optical invariant of a conventional TPM system (dashed green line) and the two macro-objectives: XLFLUOR4X (dashed red line) and MVPLAPO 2XC (dashed blue line). Comparison of (c) and (e) demonstrates trade-off between speed and throughput.