Table 2.
Specific contact resistances and related parameters, calculated using the contact end resistance method.
Metal | Rcf (Ω) | Rce (Ω) | L (nm) | LT (nm) | Rsh (Ω/□) | ρc (Ω – cm2) |
---|---|---|---|---|---|---|
Ni/Au | 4.3 (±3.2) × 104 | 2.8 (±2.2) × 104 | 3.7 (±0.7) × 102 | 3.5 (±0.4) × 102 | 6.1 (±4.9) × 104 | 5.4 (±3.9) × 10−5 |
Pd/Au | 2.5 (±1.3) × 106 | 7.3 (±1.1) × 105 | 2.8 (±0.2) × 102 | 2.2 (±1.2) × 102 | 7.9 (±7.1) × 106 | 1.3 (±0.3) × 10−3 |