Table 2.

LOPC-peak fitting results of the GaN film with U³²⁺-ion irradiation at different fluences.

Fluence (ions/cm2)	S	${\mathit{\omega }}_{{\mathit{p}}_{\mathbf{(}c{\mathbf{m}}^{-\mathbf{1}}\mathbf{)}}}$	${\mathit{\gamma }}_{\mathbf{(}c{\mathbf{m}}^{\mathbf{-}1}\mathbf{)}}$	${\mathbf{\Gamma }}_{\mathbf{(}c{\mathbf{m}}^{\mathbf{-}1}\mathbf{)}}$	C	${\mathit{n}}_{\mathbf{(}1{\mathbf{0}}^{\mathbf{17}}\mathbf{c}{\mathbf{m}}^{\mathbf{-}3})}$	${\mathit{\mu }}_{(\mathbf{c}{\mathbf{m}}^2/\mathbf{Vs})}$
Un-irradiated	0.9982	316.51	261.53	10.154	0.3909	14.899	170.68
1.0 × 109	0.9996	293.70	222.25	15.098	1.6935	12.829	200.85
1.0 × 1010	0.9985	246.31	178.076	14.093	1.5506	9.0229	250.67
5.0 × 1010	0.9979	145.95	147.32	20.732	1.4776	3.1680	302.99
1.0 × 1011	0.9978	86.122	980.16	13.698	1.3495	1.1031	45.540