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. 2018 Feb 20;9(3):1232–1243. doi: 10.1364/BOE.9.001232

Fig. 3.

Fig. 3

(a) The measured intensity of the beam scan at the focal plane using a MEMS mirror and a liquid lens set up. (b) The spot profile without adjusting focus at the edge of the scan marked by the red circle in (a). (c) The spot profile after refocusing. (d) FWHM spot size measurements at different distance from the center without adjusting focus. Using refocusing method, a spot size under 20 μm was achieved across the entire 7 mm FOV.