| DOAJ | Directory of open access journals |
| ALD | Atomic Layer Deposition |
| SMO | Semiconducting metal oxides |
| CVD | Chemical Vapor Deposition |
| TDMAT | tetrakis-dimethyl-amido titanium |
| AFM | Atomic Force Microscopy |
| XRD | X-ray Diffraction |
| XPS | X-ray Photoelectron Spectroscopy |
| GMS | Gas Mixing System |
| RMS | Root men square |
| RH | Relative Humidity |
Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.