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. 2018 Feb 27;18(3):703. doi: 10.3390/s18030703

Figure 7.

Figure 7

Fundamental resonance frequencies, (a) at CMUT operation; (b) at PMUT operation; (c) relative errors form simulations; (d) high-to-low frequency ratio of the DFUT when the length of the groove changes from 5 to 30 μm.