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Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
Fundamental resonance frequencies, (a) at CMUT operation; (b) at PMUT operation; (c) relative errors form simulations; (d) high-to-low frequency ratio of the DFUT when the length of the groove changes from 5 to 30 μm.