Table 1.

Structural parameters of the single-element DFUT in the glossary of symbols.

Structural Parameter	Symbol
Length of the nonpiezoelectric elastic layer	l
Length of the piezoelectric layer	a
Thickness of the nonpiezoelectric elastic layer	t1
Thickness of the middle metal electrode	t2
Thickness of the piezoelectric layer	t3
Thickness of the top metal electrodes	t4
Thickness of the central suspended elastic layer	ts
Height of the middle plane from the bottom surface	zm
Distance from the bottom reference surface	zi