Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.
Specific structural and material parameters of the single-element DFUT.
| Dimensions | l (μm) | a (μm) | t1 (μm) | t2 (μm) | t3 (μm) | t4 (μm) | ts (μm) |
| - | 70 | 20 | 3 | 0.15 | 0.5 | 0.15 | 0.5 |
| Materials | E (GPa) | v | ρ (kg/m3) | ε33 | S11 (1/Pa) | S12 (1/Pa) | d31 (pC/N) |
| Si | 170 | 0.28 | 2329 | 11.7 | - | - | - |
| Pt | 168 | 0.38 | 21450 | 2.7 | - | - | - |
| AlN | - | - | - | 10.26 | 2.86 × 10−12 | −0.90 × 10−12 | −1.73 |
