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. 2018 Feb 27;18(3):703. doi: 10.3390/s18030703

Table 3.

Plate parameter β varying with the length of the square groove for 70 μm DFUT.

Length of the Groove 5 μm 10 μm 15 μm 20 μm 25 μm 30 μm 35 μm 40 μm
β −0.10510 −0.04133 −0.03703 0.04768 0.23652 0.48654 0.67712 0.78614