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Root mean square (RMS) roughness values calculated from 5 × 5 μm areas between the electrodes and base resistance at room temperature (RT) in N2 for all sensing structures.
| Sample | PEGSil H | PEGSil CH | DodecSil H | DodecSil CH |
|---|---|---|---|---|
| RMS (5 × 5 μm), nm | 1.24 ± 0.20 | 1.21 ± 0.20 | 1.05 ± 0.10 | 1.06 ± 0.10 |
| Base Resistance, kΩ | 1087.5 ± 1.0 | 128.7 ± 1.0 | 18496.4 ± 1.0 | 113.3 ± 1.0 |
