TABLE I.
Chemical composition of F3-TCS and F13-TCS silanes coated on silicon by XPS (at. %).
| C | O | F | Si | Cl | |
|---|---|---|---|---|---|
| F3-TCS | 23.33 | 28.23 | 11.51 | 36.48 | 0.44 |
| F13-TCS | 21.19 | 36.34 | 23.44 | 18.99 | 0.03 |
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