TABLE II.

Wetting and frictional properties of Si surfaces with various coatings. ${\sigma }_{\mathrm{S}},{\hspace{0.17em}\sigma }_{\mathrm{S}}^{\mathrm{P}},{\hspace{0.17em}\text{and}\hspace{0.17em}\sigma }_{\mathrm{S}}^{\mathrm{D}}$ are total, dispersed, and polar surface energies, respectively. CA and CAH represent the contact angle and contact angle hysteresis, respectively. Friction coefficients were measured between a Si atomic force microscopy tip and Si surfaces with various coatings using atomic force microscopy.

	${\sigma }_S$a (mN/m)	${\sigma }_S^P$ (mN/m)	${\sigma }_S^D$ (mN/m)	${\sigma }_S$b (mN/m)	Advancing CA	Receding CA	CAH	Friction coefficient
Bare silicon	64.15	36.76	27.39	N.A	N.A	N.A	N.A	0.18
F3-TCS	15.47	2.25	13.22	15.05	110.1	64.7	45.4	0.16
F13-TCS	11.50	1.22	10.28	9.49	122.0	77.0	45.0	0.11

^aCalculated from the Owens-Wendt method.

^bCalculated from advancing and receding contact angles.²¹