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. 2018 Apr 4;8:5637. doi: 10.1038/s41598-018-23805-5

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© The Author(s) 2018

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.

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Monochromation and Spatial Resolution. (a–d) High angle annular dark field (HAADF) scanning transmission electron microscopy (STEM) images of the Si <110> zone axis at an accelerating voltage of 60 kV. (e,f) Shows the fast Fourier transform (FFT) of the HAADF images in (a–d) respectively. The dashed line in the FFT corresponds to a spatial resolution of 1 Å, Fourier points corresponding to smaller spacings are observed in all FFTs, indicating that sub-Å resolution is achieved on a probe with a ZLP FWHM of 25 meV.