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. 2018 Apr 20;8:6324. doi: 10.1038/s41598-018-24583-w

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© The Author(s) 2018

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.

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Response of micro-thermocouple to back-side electron irradiation. (a) SEM image of thermocouple on 30 nm SiN-membrane by back-scattered (in lens) and secondary (large angle scattered) electrons. (b,c) Measured amplitude and phase response of the Au-Ni thermocouple to a diagonal scan (dashed line in the inset in (b)) with $\sim 7$ μm steps measured with a lock-in amplifier. Thermocouple voltage was normalised to the transmitted electron current measured by the Faraday cup using an additional lock-in amplifier; e-beam blanking frequency was 27 Hz. The slope of line (1) in (c) corresponds to the best fit by a linear $P h a s e \sim C o n s t \times d$ dependence, where d is the distance between heat source and measurement point (only valid at large separations); the temperature diffusivity was a = 0.62 × 10⁻⁴ m²/s or 47.7 times larger than that of SiN¹².