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. 2018 Apr 24;8:6444. doi: 10.1038/s41598-018-24123-6

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© The Author(s) 2018

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.

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Plot of grating gap width (L) versus substrate bending angle (θ_S) showing the extent of membrane deflection (d/L) into the gratings. (A) Colormap showing the varying degree of membrane deflection d/L with respect to L and θ_S, with black line denoting the regime where d/L = 0.05. (B) The TEM images for experimental cases with L and θ_S values matching the corresponding symbols o, +, x, Δ and ϒ found in (A).