Table 1.
Dimensions of topography of gratings. The expected and measured (mean ± standard deviation) width, pitch and height of the gratings are tabulated.
| Grating Dimensions | Gratings Size | ||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|
| 350 nm | 500 nm | 1 µm | 2 µm | 10 µm | n | ||||||
| Expected | Measured | Expected | Measured | Expected | Measured | Expected | Measured | Expected | Measured | ||
| Line-width (nm) | 350 | 339 ± 7 | 500 | 490 ± 20 | 1,000 | 981 ± 50 | 2,000 | 1,983 ± 65 | 10,000 | 9,965 ± 337 | 7 |
| Spacing (nm) | 700 | 688 ± 22 | 1,000 | 966 ± 33 | 2,000 | 1,974 ± 52 | 4,000 | 3,906 ± 71 | 20,000 | 19,422 ± 307 | 7 |
| height (nm) | 350 | 345 ± 13 | 350 | 354 ± 22 | 350 | 341 ± 24 | 350 | 365 ± 26 | 350 | 355 ± 26 | 4 |