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. 2018 May 3;8:6958. doi: 10.1038/s41598-018-25198-x

Figure 1.

Figure 1

Lithography steps for microfabricating all glassy carbon (aGC) microstructures on a polymeric substrate. Two-step double-sided lithography patterning was used in addition to pyrolysis. Complete probes are referred as aGC probes whereas glassy carbon material is referred to simply as GC.