Table 2.
Transduction Mechanisms | Advantages | Disadvantages |
---|---|---|
Capacitive | High sensitivity High spatial resolution Large dynamic range Temperature independent |
Stray capacitance Complex measurement circuit Cross-talk between elements Susceptible to noise Hysteresis |
Piezoresistive | Simple construction High spatial resolution Low cost Compatible with VLSI |
Hysteresis High power consumption Lack of reproducibility |
Piezoelectric | High frequency response High accuracy High sensitivity High dynamic range |
Poor spatial resolution Charge leakages Dynamic sensing only |
Optical | Good reliability Wide sensing range High repeatability High spatial resolution |
Non-conformable Bulky in size Susceptible to temperature or misalignment |
Inductive | Linear output High sensitivity High power output High dynamic range |
Low frequency response Poor reliability More power consumption |