Figure 7.
Effect of polishing depth on the depth of subsurface damage (SSD) at the polishing speed of 1361 mm/s, and the height of the abrasive grain of h = 7 μm: (a) ap = 1 μm; (b) ap = 2 μm; (c) ap = 3 μm; (d) ap = 4 μm.
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