Figure 8.
Effect of polishing speed on SSD depth at the polishing depth of 2 μm, and the height of the abrasive grain h = 7 μm: (a) Vs = 523 mm/s; (b) Vs = 733 mm/s; (c) Vs = 1151 mm/s; (d) Vs = 1361 mm/s.
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