Figure 2.

SEM images of sol-gel micro-resonators generated using (a) Standard soft NIL. (b) DSS-NIL. The numbers on figure ‘a’ point to defects from the original fabrication process. (1) Roughness resulted from the finite voxel size. (2) Bump resulted from the start stop point of the DLW process. As can be seen, both of these defects almost disappear entirely after the reflow process.