Comparison of the ability of ERISM to measure the deformation induced by a moving AFM cantilever indented into the microcavity when using either the conventional scheme that fits all minima in a range of 550–750 nm or the one-minimum tracking scheme, which only scans the 650–690 nm range. (a) A schematic of the AFM cantilever positions at the start and end of one ERISM scan is given. (b) The fitted vertical displacement for different cantilever speeds and fitting ranges is given. Green and magenta represent pixels for which unphysical values were fitted (green, <−300 nm and magenta, >150 nm). Scale bars, 5 μm. All images show a section of the full field of view that is centered on the maximal indentation. To see this figure in color, go online.