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Simulated vibration modes of the microgripper obtained by FEM.
| Vibration Mode | Modal Shape | Resonant Frequency (Hz) |
|---|---|---|
| 1 | Rotational around x-axis | 238 |
| 2 | Rotational around z-axis | 463 |
| 3 | Rotational around x-axis | 2525 |
| 4 | Rotational around y-axis | 3179 |
| 5 | Rotational around x-axis | 7352 |
