Table 2.
Overview of data from electrochemical testing of the different a-SiNx thin films.
| Film | Composition | 1st Cycle | Average over 2000 cycles | ||||
|---|---|---|---|---|---|---|---|
| Specific Discharge Capacity [mAh/g] | Specific Charge Capacity [mAh/g] | Coulombic Efficiency [%] | Specific Discharge Capacity [mAh/g] | Specific Charge Capacity [mAh/g] | Coulombic Efficiency [%] | ||
| A1 | Si | 4,831 ± 176 | 3,029 ± 175 | 62.6 ± 1.5 | 1,240 ± 99 | 1,234 ± 98 | >99% |
| B1 | SiN0.39 | 4,186 ± 49 | 2,511 ± 57 | 60.0 ± 1.6 | 1,232 ± 11 | 1,226 ± 11 | >99% |
| C1* | SiN0.61 | 4,046 ± 96 | 1,976 ± 26 | 48.8 ± 0.5 | 1,302 ± 53 | 1,296 ± 52 | >99% |
| D1 | SiN0.79 | 4,173 ± 30 | 1,689 ± 2 | 40.5 ± 0.3 | 1,574 ± 38 | 1,568 ± 37 | >99% |
| E1 | SiN0.89 | 3,593 ± 76 | 1,158 ± 8 | 32.2 ± 0.8 | 1,167 ± 12 | 1,161 ± 11 | >99% |
| A2 | Si | 4,082 ± 132 | 3,410 ± 113 | 83.5 ± 1.2 | 1,266 ± 53 | 1,263 ± 54 | >99% |
| B2 | SiN0.39 | 3,311 ± 89 | 2,496 ± 100 | 75.4 ± 1.0 | 1,172 ± 28 | 1,170 ± 30 | >99% |
| C2 | SiN0.61 | 3,320 ± 25 | 2,208 ± 34 | 66.5 ± 0.5 | 1,226 ± 6 | 1,223 ± 4 | >99% |
| D2 | SiN0.79 | 2,516 ± 46 | 1,456 ± 26 | 57.9 ± 0.2 | 1,065 ± 17 | 1,068 ± 18 | >99% |
| E2* | SiN0.89 | 2,385 ± 17 | 1,208 ± 13 | 50.7 ± 0.2 | 1,128 ± 22 | 1,134 ± 29 | >99% |
Average 1st cycle specific discharge capacity, charge capacity and coulombic efficiency calculated from three*electrodes of each film, and the average specific discharge capacity, charge capacity and coulombic efficiency over the first 2000 cycles. The specific capacities are based on the total mass of the SiNx films, and the ranges show the standard deviation between the different cells of each thin film. *For films C1 and E2 the average was calculated from two rather than three cells.