250 nm lines, 250 nm space, 250 nm depth |
250 nG |
2 μm lines, 2 μm space, 2 μm height |
2 × 2μG |
1 μm lines, 2 μm space, 120 nm height |
1 × 2μG |
2 μm lines, 1 μm space, 80 nm height |
2 × 1 μG |
2 μm line ⊥ 250 nm line |
2 μG pp 250 nG |
2 μm line//250 nm line |
2 μG pr 250 nG |
2 μm lines 250 nm pillar |
2 μG 250 nP |
1 μm pitch 0.3 μm sag microlens concave |
1 μCC Lens |
1 μm pitch 0.3 μm sag microlens convex |
1 μCV Lens |
1.8 μm diameter, 2 μm pitch, 0.7 μm sag microlens concave |
1.8 μCC Lens |
1.8 μm diameter, 2 μm pitch, 0.7 μm sag microlens convex |
1.8 μCV Lens |
2 μm pillars, 12 μm pitch, 2 μm height |
2 μP |
1 μm holes, 6.5 μm pitch, 1 μm depth |
1 μW |
Unpatterned control |
UP PDMS |