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. Author manuscript; available in PMC: 2019 Apr 6.
Published in final edited form as: Nanotechnology. 2018 Apr 6;29(14):145302. doi: 10.1088/1361-6528/aaabce

Figure 2. TEM image of nanopore arrays fabricated using RIE.

Figure 2

A) Nanopore array fabricated in a SiN membrane. The array was fabricated using fabricated using a dose of 22 fC/shot, and the average pore diameter was 29±3 nm. B) Nanopore array fabricated in freestanding graphene. The array was fabricated using fabricated using a dose of 320 fC/shot, and the average pore diameter was 38±2 nm. The insets are zooms of a nanopore from each respective array, showing a circular nanopore.