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. 2018 Jun 25;8:9647. doi: 10.1038/s41598-018-27528-5

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© The Author(s) 2018

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.

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Depth profiles of normalized carbon intensity and sp³ fraction calculated from C K-edge EELS spectra of a-C films deposited under FCVA conditions of 65% duty cycle of substrate pulse biasing, 6 s deposition time, 10° ion incidence angle, and substrate bias voltage equal to (a) 0 V, (b) −25 V, (c) −75 V, (d) −125 V, and (e) −150 V. The dashed lines indicate the interfaces between adjacent layers comprising the multilayered cross-sectional structure of the a-C films.