Table 1.

Layer interfaces in the multilayered structure of a-C films determined by the normalized C-K edge intensity or the sp³ content.

Interface	Range
Capping layer/surface layer	Normalized C-K edge intensity range: 0.3–0.4
Surface layer/bulk layer	Normalized C-K edge intensity range: 0.85–0.95
Bulk layer/intermixing layer	Normalized C-K edge intensity range: 0.9–1.0
Intermixing layer/substrate	sp3 <10 at% or normalized C-K edge intensity of <0.15