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. 2018 Jun 27;8:9765. doi: 10.1038/s41598-018-28136-z

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© The Author(s) 2018

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.

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Photoluminescence (PL) intensity calibration as a function of SiN_x thickness. The PL in counts per second (CPS) was measured by the APD during laser-exposure (488 nm, 30 µW) for 6 chips of different membrane thickness. Prior to the PL measurements, the membrane thickness was measured by ellipsometry. Thicker membranes result in higher PL.